| T-PD1V(-M) Specifications |
| Travel |
20 mm (0.78") |
| Step Size |
Typical: 1 µm
Maximum: <3 µm
Adjustability: ≤30% |
| Maximum Step Frequency |
2 kHz |
| Speed (Continuous Stepping) |
3 mm/s Typical Max |
Average Velocity Variation
Over Travel Range
|
±10%e,g
|
| Horizontal Load Capacity |
3 kg (6.61 lbs) |
| Vertical Load Capacity |
100 g (3.5 oz) |
| Clamping / Holding Force |
3 N |
| Pitch / Yaw Over Travel Range |
200 µrad |
| XY Stacked Orthogonality |
<5 mrad |
| Motor Type |
Piezoelectric Inertia Drive |
| Lifetime |
>10 Billion Steps |
| Vacuum Compatibility |
10-6 Torr |
| Piezo Specifications |
| Max Operating Voltage |
125 V |
| Capacitance |
170 nF |
| Physical Specifications |
| Operating Temperature |
10 to 40 °C |
| Connector Type |
Flying Leads Attached to Stage;
Additional Bare Lead to SMC Female Cable Included |
| Cable Length |
0.75 m (2.48 ft) Flying Lead for Vacuum;
1.0 m (3.3 ft) Cored Cable Included for Wiring Outside Chamber |
| Top Plate Mounting Options |
Four 2-56 (M2) Threaded Holes, 3.5 mm Deep;
Six 8-32 (M4) Threaded Holes, 3.2 mm Deep;
Six Ø2 mm Dowel Pin Holes, 1.5 mm Deep;
PD1T(/M) and PD1U(/M)Adapters |
| Dimensions |
32.5 mm x 32.0 mm x 11.5 mm
(1.28" x 1.26" x 0.45") |
| Weight (Including Cable) |
80 g (2.82 oz) |
