TH-MLS203-1 - Fast XY Scanning Stage
TH-MLS203-1 - Fast XY Scanning Stage
| Key Specificationsa | |
|---|---|
| Travel Range | 110 mm x 75 mm (4.3" x 2.95") |
| Velocity (Max) | 250 mm/s |
| Acceleration (Max) | 2000 mm/s2 |
| Bidirectional Repeatability | 0.25 µm |
| Unidirectional Repeatability | 0.25 µm |
| Horizontal Load Capacity (Max) | 1.0 kg (2.2 lb) |
| Min Achievable Incremental Movement | 0.1 µm |
| Home Location Accuracy | 0.25 µm |
| Absolute On-Axis Accuracy | <3 µm |